KED
L380/L580
- Semiconductor cleaning machine
- Fully automatic inline cleaning machine
- Suitable for high capacity product residual cleaning
- Full set features including cleaning, rinsing and drying
- Maximize cleaning performance and process flexibility
Dimension (L380) | L4000 x W1646 x H1914 mm |
Weight (L380) | 2950 KG |
Dimension (L580) | L5800 x W1854 x H1960 mm |
Weight (L580) | 3620 KG |