Solutions
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KED
FP100
- Automatic centrifugal cleaning machine
- Suitable for all types of wafer carriers (FOUP, FOSB & cassette)
- Particle cleaning using DI water
- Drying through a combination of centrifugation and hot air
| Dimension | L1780 x W1870 x H2550 mm |
| Weight | 1200 KG |
| Cleaning capacity | 8 pcs / batch (12" FOUP) |